Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth
نویسندگان
چکیده
منابع مشابه
Integrated optomechanical circuits
Optomechanical circuits are a promising candidate to realize various signal processing functions on a chip. In this paper we review several different NOMS structures fabricated in a silicon-on-insulator platform. © 2010 Optical society of America OCIS-codes: (130.3120) Integrated optics devices; (250.4745) Optomechanics
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ژورنال
عنوان ژورنال: Nature Communications
سال: 2020
ISSN: 2041-1723
DOI: 10.1038/s41467-020-16269-7